Nanoimprint lithography

In the Watkins group, we have developed a form of nanoimprint lithography (NIL) which allows for the direct patterning of nanoparticle and nanoparticle-polymer composite inks. The method, solvent-assisted soft NIL, provides a diverse platform for patterning nanostructures for a variety of applications such as optics, energy storage, and antimicrobial surfaces. This technique facilitates the patterning of different nanoparticles into sub-100 nm features on different substrates.  We are equpped for both batch and roll-to-roll nanoimprinting.  A descirption of the roll-to-roll tools can be found in the facilites section. 


Figure. Photographs and micrographs of imprinted nanoparticle and nanoparticle/polymer hybrids on rigid and flexible substrates.

 

Composites

Solvent-assisted, soft NIL enables patterning of highly-loaded polymer/nanoparticle resins. For example, we have demonstrated patterning of 90/10 (by weight) TiO2-nanoparticle based UV resins in the fabrication of photonic bandgap materials. By incorporating different nanoparticles such as ZrO2, CeO2, and Cu, we can target many different applications. Both the solvent and uncured UV resin provide fluidity for imprinting.


Figure. Schematic of solvent-assisted soft NIL process (a) and SEM top-view of consecutively imprinted 50/50 organic/inorganic line gratings (b).

 

Inorganics

For fabrication of coatings or devices applicable in harsh environments, polymer/nanoparticle composites provide insufficient long-term stability and/or mechanical properties. Therefore, we have also extended our patterning technique to the direct patterning of inorganic, nanoparticle-based inks, relying on solvent transfer through a soft PDMS stamp.


Figure. SEM images of imprinted inorganic TiO2 nanoparticle-based inks on a large scale.


Related Publications:

  • Beaulieu, M.R., Hendricks, N.R. and Watkins, J.J., 2014. Large-area printing of optical gratings and 3D photonic crystals using solution-processable nanoparticle/polymer composites. ACS Photonics, 1(9), pp.799-805.
  • Kothari, R., Beaulieu, M.R., Hendricks, N.R., Li, S. and Watkins, J.J., 2017. Direct Patterning of Robust One-Dimensional, Two-Dimensional, and Three-Dimensional Crystalline Metal Oxide Nanostructures Using Imprint Lithography and Nanoparticle Dispersion Inks. Chemistry of Materials, 29(9), pp.3908-3918.
  • Li, W., Zhou, Y., Howell, I.R., Gai, Y., Naik, A.R., Li, S., Carter, K.R. and Watkins, J.J., 2018. Direct Imprinting of Scalable, High-Performance Woodpile Electrodes for Three-Dimensional Lithium-Ion Nanobatteries. ACS applied materials & interfaces, 10(6), pp.5447-5454.